<dfn id='a6qke'><optgroup id='a6qke'></optgroup></dfn><tfoot id='a6qke'><bdo id='a6qke'><div id='a6qke'></div><i id='a6qke'><dt id='a6qke'></dt></i></bdo></tfoot> Tantalum Pentafluoride
五氟化钽（TaF5），相对分子量为276，熔点为96.8℃，沸点为229.5℃，是一种白色结晶，折光能力强。五氟化钽微溶于热的二硫化碳和四氯化碳溶液中，溶于水和乙醚、氢氟酸、硝酸、发烟硝酸，在空气中吸湿而不水解。高纯五氟化钽在微电子工业中用作化学气相淀积硅化钽或钽膜，制作低电阻、高熔点的电路互连线和栅极。五氟化钽在电子元器件表面、半导体器件表面、钛及金属氮化物电极表面、金属钨表面上，可形成附着力极强、厚度为0.1μm级的绝缘薄膜，具有高的介电率。
Tantalum pentafluoride (TaF5) is a white crystal with strong refractive ability at room temperature, its relative molecular mass is 276, melting point is 96.8℃, boiling point is 229.5℃. Tantalum pentafluoride is slightly soluble in hot solution of carbon disulfide and carbon tetrachloride, it is soluble in water and ether, hydrofluoric acid, nitric acid, it is hygroscopic in air without hydrolysis. High pure tantalum pentafluoride is used in the microelectronics industry for chemical vapor deposition of tantalum silicide or tantalum film, in order to produce interconnects and grid electrode with low resistance and high melting point. Tantalum pentafluoride can form insulation film with strong adhesion, thickness of 0.1 μm, and a high dielectric constant on the surface of the electronic components, semiconductor devices, titanium, metallic nitride electrode and metal tungsten.
| 项目Items | 单位Units | 指标Index |
| 五氟化钽Tantalum pentafluoride≥ | Vol.% | 99.9 |
| 四氟化碳Carbon tetrafluoride（CF4）≤ | Vol.ppm | 10 |
| 氮气Nitrogen（N2）≤ | Vol.ppm | 50 |
| （氧+氩）Oxygen+Argon（O2+Ar）≤ | Vol.ppm | 50 |
| 六氟化硫Sulfur hexafluoride（SF6）≤ | Vol.ppm | 10 |
| 四氟化硅Silicon tetrafluoride（SiF4）≤ | Vol.ppm | 10 |
| 氟化氢Hydrogen fluoride（HF）≤ | Vol.ppm | 800 |
五氟化钽在电子工业中用作化学气相淀积硅化钽或钽膜，制作低电阻、高熔点的电路互连线和栅极。
Tantalum pentafluoride is used in the microelectronics industry for chemical vapor deposition of tantalum silicide or tantalum film, in order to produce interconnects and grid electrode with low resistance and high melting point.
五氟化钽储存于4.64L、10.2L、44L钢瓶中，具体包装规格可根据用户需求定制更改。五氟化钽贮存于阴凉、干燥的库房中，确保有良好的通风。
Tantalum pentafluoride is stored in s with packing specifications of 4.64L/10.2L/44L, the specific packaging specifications can be customized according to user requirements. Tantalum pentafluoride is stored in a shady and dry storeroom.
